公开(公告)号：US20170345622A1

公开(公告)日：2017-11-30

申请号：US15166777

申请日：2016-05-27

申请人： MKS Instruments, Inc.

发明人： Mohammad Kamarehi ,  Chaolin Hu ,  Olivia Keller

IPC分类号： H01J37/32

CPC分类号： H01J37/32229 ,  H01J37/32247 ,  H01J37/32256 ,  H01J37/32284 ,  H01J37/32467

摘要： A plasma applicator includes a plasma discharge tube and a microwave cavity at least partially surrounding a portion of the plasma discharge tube. Microwave energy is coupled to the microwave cavity via a coupling iris. At least two orthogonal dimensions of the microwave cavity are selected such that the microwave energy in the microwave cavity propagates in a transverse electric (TE) mode. Primary electric fields generated from the microwave energy combine with an evanescent electric field generated from the coupling iris, such that a combined electric field in the microwave cavity is substantially uniform along the longitudinal axis of the plasma discharge tube. A plurality of radial microwave chokes is disposed over an exterior of the plasma discharge tube. Positions of the microwave chokes are such that microwave energy propagating in the TE mode and a transverse electric magnetic (TEM) mode is attenuated.

公开(公告)号：US20180269037A1

公开(公告)日：2018-09-20

申请号：US15460611

申请日：2017-03-16

申请人： MKS Instruments, Inc.

发明人： Mohammad Kamarehi ,  Ken Trenholm ,  Colin Sanford ,  Kevin Wenzel ,  Olivia Keller

IPC分类号： H01J37/32

摘要： A microwave system has a solid-state generator which generates microwave energy and includes at least one control input for receiving a control signal to vary electrically a parameter of the microwave energy. A microwave load receives the microwave energy and produces an effect in response to the microwave energy. A microwave conducting element couples the microwave energy to the microwave load. An impedance match adjusting device is coupled to the microwave conducting element to vary at least one of the parameters of the microwave energy. The effect produced in response to the microwave energy is altered by both electrical variation of the parameter of the microwave energy via the control signal and adjustment of the impedance match adjusting device to vary the parameter of the microwave energy.

公开(公告)号：US10790118B2

公开(公告)日：2020-09-29

申请号：US15460611

申请日：2017-03-16

申请人： MKS Instruments, Inc.

发明人： Mohammad Kamarehi ,  Ken Trenholm ,  Colin Sanford ,  Kevin Wenzel ,  Olivia Keller

IPC分类号： H01J37/32 ,  H05B6/64 ,  H01L21/67 ,  H05B6/68 ,  H05B6/70 ,  H05B6/80 ,  H01P5/10 ,  H01P1/20

摘要： A microwave system has a solid-state generator which generates microwave energy and includes at least one control input for receiving a control signal to vary electrically a parameter of the microwave energy. A microwave load receives the microwave energy and produces an effect in response to the microwave energy. A microwave conducting element couples the microwave energy to the microwave load. An impedance match adjusting device is coupled to the microwave conducting element to vary at least one of the parameters of the microwave energy. The effect produced in response to the microwave energy is altered by both electrical variation of the parameter of the microwave energy via the control signal and adjustment of the impedance match adjusting device to vary the parameter of the microwave energy.

公开(公告)号：US11222770B2

公开(公告)日：2022-01-11

申请号：US16993775

申请日：2020-08-14

申请人： MKS Instruments, Inc.

发明人： Mohammad Kamarehi ,  Ken Trenholm ,  Colin Sanford ,  Kevin Wenzel ,  Olivia Keller

IPC分类号： H01J37/32 ,  H05B6/64 ,  H05B6/68 ,  H01L21/67 ,  H05B6/70 ,  H05B6/80 ,  H01P5/10 ,  H01P1/20

摘要： A microwave system has a solid-state generator which generates microwave energy and includes at least one control input for receiving a control signal to vary electrically a parameter of the microwave energy. A microwave load receives the microwave energy and produces an effect in response to the microwave energy. A microwave conducting element couples the microwave energy to the microwave load. An impedance match adjusting device is coupled to the microwave conducting element to vary at least one of the parameters of the microwave energy. The effect produced in response to the microwave energy is altered by both electrical variation of the parameter of the microwave energy via the control signal and adjustment of the impedance match adjusting device to vary the parameter of the microwave energy.

公开(公告)号：US20210005430A1

公开(公告)日：2021-01-07

申请号：US16993775

申请日：2020-08-14

申请人： MKS Instruments, Inc.

发明人： Mohammad Kamarehi ,  Ken Trenholm ,  Colin Sanford ,  Kevin Wenzel ,  Olivia Keller

IPC分类号： H01J37/32 ,  H05B6/64 ,  H05B6/68 ,  H05B6/70 ,  H05B6/80 ,  H01L21/67

摘要： A microwave system has a solid-state generator which generates microwave energy and includes at least one control input for receiving a control signal to vary electrically a parameter of the microwave energy. A microwave load receives the microwave energy and produces an effect in response to the microwave energy. A microwave conducting element couples the microwave energy to the microwave load. An impedance match adjusting device is coupled to the microwave conducting element to vary at least one of the parameters of the microwave energy. The effect produced in response to the microwave energy is altered by both electrical variation of the parameter of the microwave energy via the control signal and adjustment of the impedance match adjusting device to vary the parameter of the microwave energy.

公开(公告)号：US09831066B1

公开(公告)日：2017-11-28

申请号：US15166777

申请日：2016-05-27

申请人： MKS Instruments, Inc.

发明人： Mohammad Kamarehi ,  Chaolin Hu ,  Olivia Keller

IPC分类号： H01J37/32

CPC分类号： H01J37/32229 ,  H01J37/32247 ,  H01J37/32256 ,  H01J37/32284 ,  H01J37/32467

摘要： A plasma applicator includes a plasma discharge tube and a microwave cavity at least partially surrounding a portion of the plasma discharge tube. Microwave energy is coupled to the microwave cavity via a coupling iris. At least two orthogonal dimensions of the microwave cavity are selected such that the microwave energy in the microwave cavity propagates in a transverse electric (TE) mode. Primary electric fields generated from the microwave energy combine with an evanescent electric field generated from the coupling iris, such that a combined electric field in the microwave cavity is substantially uniform along the longitudinal axis of the plasma discharge tube. A plurality of radial microwave chokes is disposed over an exterior of the plasma discharge tube. Positions of the microwave chokes are such that microwave energy propagating in the TE mode and a transverse electric magnetic (TEM) mode is attenuated.