Invention Grant
- Patent Title: Wrap around contact
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Application No.: US16402527Application Date: 2019-05-03
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Publication No.: US10790370B2Publication Date: 2020-09-29
- Inventor: Chan Syun David Yang
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: H01L29/417
- IPC: H01L29/417 ; H01L29/78 ; H01L29/66 ; H01L21/263 ; H01L21/265 ; H01L21/311 ; H01L29/08 ; H01L29/40 ; H01L29/45 ; H01L27/088 ; H01L21/8234 ; H01L29/165

Abstract:
In some embodiments, a semiconductor device is provided. The semiconductor device includes a first semiconductor fin that extends from a substrate. The first semiconductor fin has source and drain regions, which are separated from one another by a channel region in the first semiconductor fin. A gate overlies an upper surface and sidewalls of the channel region. A contact is coupled to the source or drain region of the first semiconductor fin, where the source or drain region includes a layer of epitaxial material with a substantially diamond-shaped cross-section. The contact surrounds the source or drain region on top and bottom surfaces of the substantially diamond-shaped cross-section. A first capping material is arranged along outer sidewalls of the first semiconductor fin under the contact. The first capping material has an uppermost surface that is spaced below a lowermost surface of the contact by a non-zero distance.
Public/Granted literature
- US20190259846A1 METHODS FOR FORMING WRAP AROUND CONTACT Public/Granted day:2019-08-22
Information query
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