Invention Grant
- Patent Title: MEMS assembly
-
Application No.: US16270315Application Date: 2019-02-07
-
Publication No.: US10793419B2Publication Date: 2020-10-06
- Inventor: Marc Fueldner , Niccolo De Milleri , Bernd Goller , Ulrich Krumbein , Gerhard Lohninger , Giordano Tosolini , Andreas Wiesbauer
- Applicant: Infineon Technologies AG
- Applicant Address: DE Neubiberg
- Assignee: INFINEON TECHNOLOGIES AG
- Current Assignee: INFINEON TECHNOLOGIES AG
- Current Assignee Address: DE Neubiberg
- Agency: Slater Matsil, LLP
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@75066114
- Main IPC: B81B7/00
- IPC: B81B7/00 ; H04R1/02 ; H04R19/00 ; H04R19/04

Abstract:
A MEMS assembly includes a housing having an internal volume V, wherein the housing has a sound opening to the internal volume V, a MEMS component in the housing adjacent to the sound opening, and a layer element arranged at least regionally at a surface region of the housing that faces the internal volume V, wherein the layer element includes a layer material having a lower thermal conductivity and a higher heat capacity than the housing material of the housing that adjoins the layer element.
Public/Granted literature
- US20190270637A1 MEMS ASSEMBLY Public/Granted day:2019-09-05
Information query