Invention Grant
- Patent Title: Multi-plate faceplate for a processing chamber
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Application No.: US15671909Application Date: 2017-08-08
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Publication No.: US10811232B2Publication Date: 2020-10-20
- Inventor: Deepak Doddabelavangala Srikantaiah , Sheshraj L. Tulshibagwale , Saravjeet Singh , Alexander Tam
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan LLP
- Main IPC: H01J37/32
- IPC: H01J37/32 ; B05B1/00 ; B05B1/18

Abstract:
Embodiments of the disclosure relate to a multi-plate faceplate having a first plate and a second plate. The first plate has a plurality of first plate openings. The second plate has a first surface, an opposed second surface and a plurality of second plate openings extending therethrough. The first surface is mechanically coupled to the first plate. A second plate opening has a conical portion configured to be fluidly coupled to a first plate opening and decreasing in cross-section in the depth direction thereof from the second surface. A surface of the conical portion is coated with a protective coating adjacent to the first and second surfaces. In another embodiment, the first plate has a protrusion extending therefrom into a recess formed inwardly of the first surface. The protrusion has a passage extending therethrough fluidly connected to the recess, which is fluidly connected to the second plate opening.
Public/Granted literature
- US20190051499A1 MULTI-PLATE FACEPLATE FOR A PROCESSING CHAMBER Public/Granted day:2019-02-14
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