公开(公告)号：US10811232B2

公开(公告)日：2020-10-20

申请号：US15671909

申请日：2017-08-08

申请人： Applied Materials, Inc.

发明人： Deepak Doddabelavangala Srikantaiah ,  Sheshraj L. Tulshibagwale ,  Saravjeet Singh ,  Alexander Tam

IPC分类号： H01J37/32 ,  B05B1/00 ,  B05B1/18

摘要： Embodiments of the disclosure relate to a multi-plate faceplate having a first plate and a second plate. The first plate has a plurality of first plate openings. The second plate has a first surface, an opposed second surface and a plurality of second plate openings extending therethrough. The first surface is mechanically coupled to the first plate. A second plate opening has a conical portion configured to be fluidly coupled to a first plate opening and decreasing in cross-section in the depth direction thereof from the second surface. A surface of the conical portion is coated with a protective coating adjacent to the first and second surfaces. In another embodiment, the first plate has a protrusion extending therefrom into a recess formed inwardly of the first surface. The protrusion has a passage extending therethrough fluidly connected to the recess, which is fluidly connected to the second plate opening.