- 专利标题: Connected thread groove spacer and vacuum pump
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申请号: US15780155申请日: 2016-12-08
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公开(公告)号: US10823200B2公开(公告)日: 2020-11-03
- 发明人: Yoshiyuki Sakaguchi , Tooru Miwata , Kengo Saegusa , Nahoko Yoshihara
- 申请人: Edwards Japan Limited
- 申请人地址: JP Chiba
- 专利权人: Edwards Japan Limited
- 当前专利权人: Edwards Japan Limited
- 当前专利权人地址: JP Chiba
- 代理机构: Westman, Champlin & Koehler, P.A.
- 代理商 Theodore M. Magee
- 优先权: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@2b1986eb
- 国际申请: PCT/JP2016/086591 WO 20161208
- 国际公布: WO2017/099182 WO 20170615
- 主分类号: F04D29/54
- IPC分类号: F04D29/54 ; F04D19/04 ; F04D17/16
摘要:
A thread groove pump portion, which is an exhaust element, is structured such that a Siegbahn structure is attached onto a cylindrical thread, and such that respective parts are connected to each other at this attachment section. A flow channel of the Siegbahn portion and a flow channel of the cylindrical thread (the thread groove pump portion) are connected to each other so as to substantially form a right angle when viewed from an axis direction of the vacuum pump, thus, the flow channel of the Siegbahn portion and the flow channel of the thread groove pump portion are connected to each other. the length of a compression flow channel of the thread groove pump portion can be increased in a radial direction due to the connected Siegbahn portion.
公开/授权文献
- US20180355888A1 CONNECTED THREAD GROOVE SPACER AND VACUUM PUMP 公开/授权日:2018-12-13
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