Invention Grant
- Patent Title: Dual transport orientation for stacked vertical transport field-effect transistors
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Application No.: US16237935Application Date: 2019-01-02
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Publication No.: US10833079B2Publication Date: 2020-11-10
- Inventor: Tenko Yamashita , Chen Zhang , Kangguo Cheng , Heng Wu
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Ryan, Mason & Lewis, LLP
- Agent Douglas Pearson
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L27/092 ; H01L29/78 ; H01L29/06 ; H01L27/02 ; H01L29/04 ; H01L29/08 ; H01L29/417 ; H01L21/8238 ; H01L21/822 ; H01L21/3065 ; H01L21/225 ; H01L21/311 ; H01L21/308 ; H01L29/10 ; H01L21/324 ; H01L21/02 ; H01L29/36 ; H01L21/265

Abstract:
A semiconductor structure includes a substrate, a vertical fin disposed over a top surface of the substrate, a first vertical transport field-effect transistor (VTFET) disposed over the top surface of the substrate surrounding a first portion of the vertical fin, an isolation layer disposed over the first VTFET surrounding a second portion of the vertical fin, and a second VTFET disposed over a top surface of the isolation layer surrounding a third portion of the vertical fin. The first portion of the vertical fin includes a first semiconductor layer with a first crystalline orientation providing a first vertical transport channel for the first VTFET, the second portion of the vertical fin includes an insulator, and the third portion of the vertical fin includes a second semiconductor layer with a second crystalline orientation providing a second vertical transport channel for the second VTFET.
Public/Granted literature
- US20200212036A1 DUAL TRANSPORT ORIENTATION FOR STACKED VERTICAL TRANSPORT FIELD-EFFECT TRANSISTORS Public/Granted day:2020-07-02
Information query
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