- 专利标题: Integrated fan-out packages and methods of forming the same
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申请号: US15965981申请日: 2018-04-30
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公开(公告)号: US10861814B2公开(公告)日: 2020-12-08
- 发明人: Tzung-Hui Lee , Chen-Hua Yu , Chi-Ming Tsai , Hung-Jui Kuo , Ming-Che Ho
- 申请人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 申请人地址: TW Hsinchu
- 专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人地址: TW Hsinchu
- 代理机构: JCIPRNET
- 主分类号: H01L23/00
- IPC分类号: H01L23/00 ; H01L23/538 ; H01L21/48 ; H01L23/31 ; H01L23/498 ; H01L21/56 ; H01L21/683
摘要:
Integrated fan-out packages and methods of forming the same are disclosed. An integrated fan-out package includes a bump structure, a polymer layer and a metal layer. The bump structure includes a metal pad and a bump electrically connected to the metal pad. The polymer layer extends laterally from a sidewall of the bump. The metal layer is over the bump structure and in physical contact with a side surface of the metal pad.
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