Invention Grant
- Patent Title: Memory device with reduced capacitance
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Application No.: US16021550Application Date: 2018-06-28
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Publication No.: US10861867B2Publication Date: 2020-12-08
- Inventor: Khaled Hasnat , Prashant Majhi , Krishna Parat
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Schwabe, Williamson & Wyatt, P.C.
- Main IPC: H01L27/11582
- IPC: H01L27/11582 ; H01L23/532 ; H01L29/49 ; H01L21/768 ; H01L29/51 ; H01L23/528 ; H01L21/28 ; H01L29/66 ; H01L29/792 ; H01L21/3105 ; H01L23/00 ; H01L21/3065 ; H01L21/3213 ; H01L21/02

Abstract:
Embodiments of the present disclosure are directed towards techniques to provide a memory device with reduced capacitance. In one embodiment, a memory array is formed in a die, and includes one or more pillars and a plurality of wordlines coupled with the one or more pillars. Adjacent wordlines of the plurality of wordlines are separated by respective dielectric layers, which may include components, to reduce capacitance of the plurality of wordlines. The components comprise air gaps or low-k dielectric material. Other embodiments may be described and/or claimed.
Public/Granted literature
- US20190043882A1 MEMORY DEVICE WITH REDUCED CAPACITANCE Public/Granted day:2019-02-07
Information query
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