- 专利标题： Manufacturing flexible organic electronic devices
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申请号： US15459044申请日： 2017-03-15
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公开(公告)号： US10862074B2公开(公告)日： 2020-12-08
- 发明人: Ruiqing Ma , Jeff Silvernail , Prashant Mandlik , Julia J. Brown , John Felts
- 申请人： UNIVERSAL DISPLAY CORPORATION
- 申请人地址： US NJ Ewing
- 专利权人： Universal Display Corporation
- 当前专利权人： Universal Display Corporation
- 当前专利权人地址： US NJ Ewing
- 代理商 Butzel Long
- 主分类号： H01L51/56
- IPC分类号： H01L51/56 ; H01L51/00 ; H01L51/52 ; C23C14/24 ; C23C14/00 ; C23C14/04
摘要：
A method of forming microelectronic systems on a flexible substrate includes depositing a plurality of layers on one side of the flexible substrate. Each of the plurality of layers is deposited from one of a plurality of sources. A vertical projection of a perimeter of each one of the plurality of sources does not intersect the flexible substrate. The flexible substrate is in motion during the depositing the plurality of layers via a roll to roll feed and retrieval system.
公开/授权文献
- US20170187006A1 MANUFACTURING FLEXIBLE ORGANIC ELECTRONIC DEVICES 公开/授权日：2017-06-29
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