Invention Grant
- Patent Title: Manufacturing flexible organic electronic devices
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Application No.: US15459044Application Date: 2017-03-15
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Publication No.: US10862074B2Publication Date: 2020-12-08
- Inventor: Ruiqing Ma , Jeff Silvernail , Prashant Mandlik , Julia J. Brown , John Felts
- Applicant: UNIVERSAL DISPLAY CORPORATION
- Applicant Address: US NJ Ewing
- Assignee: Universal Display Corporation
- Current Assignee: Universal Display Corporation
- Current Assignee Address: US NJ Ewing
- Agent Butzel Long
- Main IPC: H01L51/56
- IPC: H01L51/56 ; H01L51/00 ; H01L51/52 ; C23C14/24 ; C23C14/00 ; C23C14/04
Abstract:
A method of forming microelectronic systems on a flexible substrate includes depositing a plurality of layers on one side of the flexible substrate. Each of the plurality of layers is deposited from one of a plurality of sources. A vertical projection of a perimeter of each one of the plurality of sources does not intersect the flexible substrate. The flexible substrate is in motion during the depositing the plurality of layers via a roll to roll feed and retrieval system.
Public/Granted literature
- US20170187006A1 MANUFACTURING FLEXIBLE ORGANIC ELECTRONIC DEVICES Public/Granted day:2017-06-29
Information query
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