Invention Grant
- Patent Title: Correction of fabricated shapes in additive manufacturing using sacrificial material
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Application No.: US15873851Application Date: 2018-01-17
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Publication No.: US10882160B2Publication Date: 2021-01-05
- Inventor: Daniel Redfield , Jason Garcheung Fung , Mayu Felicia Yamamura
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Fish & Richardson P.C.
- Main IPC: B24D11/00
- IPC: B24D11/00 ; B29C64/112 ; B29C64/393 ; B33Y10/00 ; B33Y30/00 ; B33Y50/02 ; B33Y80/00 ; B29C64/282 ; B29C64/40 ; C09G1/16 ; B24B37/20 ; B29L31/00

Abstract:
A method of fabricating a polishing pad using an additive manufacturing system includes depositing a first set of successive layers onto a support by droplet ejection. Depositing the first set of successive layers includes dispensing a polishing pad precursor to first regions corresponding to partitions of the polishing pad and dispensing a sacrificial material to second regions corresponding to grooves of the polishing pad. A second set of successive layers is deposited by droplet ejection over the first set of successive layers. The second set of successive layers corresponds to a lower portion of the polishing pad. The first set of successive layer and the second set of successive layers provide a body. The body is removed from the support. Removing the sacrificial material from the body provides the polishing pad with a polishing surface that has the partitions separated by the grooves.
Public/Granted literature
- US20180339402A1 CORRECTION OF FABRICATED SHAPES IN ADDITIVE MANUFACTURING USING SACRIFICIAL MATERIAL Public/Granted day:2018-11-29
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