Invention Grant
- Patent Title: Method for directly synthesizing graphene on surface of target object and device including graphene prepared using the method
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Application No.: US16198877Application Date: 2018-11-23
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Publication No.: US10883176B2Publication Date: 2021-01-05
- Inventor: Yong-Won Song , Md. Siam Uddin , Jaehyun Park
- Applicant: KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY
- Applicant Address: KR Seoul
- Assignee: KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY
- Current Assignee: KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY
- Current Assignee Address: KR Seoul
- Agency: Cantor Colburn LLP
- Priority: KR10-2018-0053154 20180509
- Main IPC: C23C16/26
- IPC: C23C16/26 ; C23C18/12 ; H01L21/02 ; H01S3/067 ; H01S3/113 ; H01S3/10 ; H01S3/23 ; C23C16/455 ; C23C16/40 ; H01S3/0941 ; H01L29/16 ; H01L29/786 ; H01S3/094

Abstract:
A method for directly synthesizing graphene on a surface of a target object includes: forming a non-metal layer on a support substrate; disposing the target object in a space above the support substrate, which is opposite to the non-metal layer; and injecting a carbon precursor to form graphene on the surface of the target object to synthesize a graphene film, wherein the graphene is nucleated and grown by a decomposition of the carbon precursor, the carbon precursor is decomposed by heat with catalytic assistance from the non-metal layer, and a carbon atom from the decomposition of the precursor is anchored on the surface to form the graphene film.
Information query
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