- 专利标题: Integrated circuit device with back-side interconnection to deep source/drain semiconductor
-
申请号: US16348116申请日: 2016-12-23
-
公开(公告)号: US10886217B2公开(公告)日: 2021-01-05
- 发明人: Patrick Morrow , Mauro J. Kobrinsky , Mark T. Bohr , Tahir Ghani , Rishabh Mehandru
- 申请人: Intel Corporation
- 申请人地址: US CA Santa Clara
- 专利权人: Intel Corporation
- 当前专利权人: Intel Corporation
- 当前专利权人地址: US CA Santa Clara
- 代理机构: Green, Howard & Mughal LLP
- 国际申请: PCT/US2016/068564 WO 20161223
- 国际公布: WO2018/106267 WO 20180614
- 主分类号: H01L21/8234
- IPC分类号: H01L21/8234 ; H01L29/66 ; H01L29/78 ; H01L23/528 ; H01L21/306 ; H01L27/02 ; H01L27/088 ; H01L29/08 ; H01L29/10 ; H01L29/40 ; H01L21/768 ; H01L29/417 ; H01L29/772 ; H01L23/522 ; G06F30/392 ; G06F30/394
摘要:
Transistor cell architectures including both front-side and back-side structures. A transistor may include one or more semiconductor fins with a gate stack disposed along a sidewall of a channel portion of the fin. One or more source/drain regions of the fin are etched to form recesses with a depth below the channel region. The recesses may extend through the entire fin height. Source/drain semiconductor is then deposited within the recess, coupling the channel region to a deep source/drain. A back-side of the transistor is processed to reveal the deep source/drain semiconductor material. One or more back-side interconnect metallization levels may couple to the deep source/drain of the transistor.
公开/授权文献
信息查询
IPC分类: