Invention Grant
- Patent Title: Automatic calibration optical interferometer and automatic calibration method of optical interferometer
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Application No.: US16379721Application Date: 2019-04-09
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Publication No.: US10890429B2Publication Date: 2021-01-12
- Inventor: Hung Chih Chiang , Cheng Yi Chang , Ting Wei Chang , Chi Shen Chang
- Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
- Applicant Address: TW Hsinchu
- Assignee: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
- Current Assignee: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
- Current Assignee Address: TW Hsinchu
- Agency: Maschoff Brennan
- Priority: TW107147454A 20181227
- Main IPC: G01B9/02
- IPC: G01B9/02

Abstract:
An automatic calibration optical interferometer comprises: a light source; an optical interference assembly, which divides a low coherent light into a first and a second incident light; an optical sampling assembly, with a first end receiving the first incident light and a partially reflective window at the second end being configured to divide the first incident light into a first reflected light and a first penetrating light configured to be emitted to the test sample; an optical reference assembly, with a reference mirror and an actuator, wherein the optical sampling assembly emits the second incident light to the reference mirror to generate a second reflected light, and the actuator moves the reference mirror; a polychromator, which outputs a displacement signal according to an optical path difference variation between the first and second reflected lights; and a displacement controller, which controls the actuator according to the displacement signal.
Public/Granted literature
- US20200208958A1 AUTOMATIC CALIBRATION OPTICAL INTERFEROMETER AND AUTOMATIC CALIBRATION METHOD OF OPTICAL INTERFEROMETER Public/Granted day:2020-07-02
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