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公开(公告)号:US11583169B2
公开(公告)日:2023-02-21
申请号:US16987744
申请日:2020-08-07
Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
Inventor: Chun-Chieh Huang , Yuan Chin Lee , Chi Shen Chang , Hung Chih Chiang
Abstract: An optical fiber scanning probe includes a rotor and at least one optical fiber. The rotor includes a torque rope rotatable about its central axis. The optical fiber is disposed on the rotor and eccentric relative to the torque rope. A central axis of the optical fiber is substantially parallel to the central axis of the torque rope. When the torque rope rotates about its central axis, the rotor brings a free end of the optical fiber to scan along an arc path.
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公开(公告)号:US10890429B2
公开(公告)日:2021-01-12
申请号:US16379721
申请日:2019-04-09
Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
Inventor: Hung Chih Chiang , Cheng Yi Chang , Ting Wei Chang , Chi Shen Chang
IPC: G01B9/02
Abstract: An automatic calibration optical interferometer comprises: a light source; an optical interference assembly, which divides a low coherent light into a first and a second incident light; an optical sampling assembly, with a first end receiving the first incident light and a partially reflective window at the second end being configured to divide the first incident light into a first reflected light and a first penetrating light configured to be emitted to the test sample; an optical reference assembly, with a reference mirror and an actuator, wherein the optical sampling assembly emits the second incident light to the reference mirror to generate a second reflected light, and the actuator moves the reference mirror; a polychromator, which outputs a displacement signal according to an optical path difference variation between the first and second reflected lights; and a displacement controller, which controls the actuator according to the displacement signal.
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