Invention Grant
- Patent Title: Photobucket floor colors with selective grafting
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Application No.: US16317015Application Date: 2016-09-30
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Publication No.: US10892184B2Publication Date: 2021-01-12
- Inventor: Robert L. Bristol , Kevin L. Lin , James M. Blackwell , Rami Hourani , Eungnak Han
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Schwabe, Williamson & Wyatt, P.C.
- International Application: PCT/US2016/054742 WO 20160930
- International Announcement: WO2018/063318 WO 20180405
- Main IPC: H01L21/768
- IPC: H01L21/768 ; H01L21/027 ; H01L21/311

Abstract:
Approaches based on photobucket floor colors with selective grafting for semiconductor structure fabrication, and the resulting structures, are described. For example, a grating structure is formed above an ILD layer formed above a substrate, the grating structure including a plurality of dielectric spacers separated by alternating first trenches and second trenches, grafting a resist-inhibitor layer in the first trenches but not in the second trenches, forming photoresist in the first trenches and in the second trenches, exposing and removing the photoresist in select ones of the second trenches to a lithographic exposure to define a set of via locations, etching the set of via locations into the ILD layer, and forming a plurality of metal lines in the ILD layer, where select ones of the plurality of metal lines includes an underlying conductive via corresponding to the set of via locations.
Public/Granted literature
- US20190318958A1 PHOTOBUCKET FLOOR COLORS WITH SELECTIVE GRAFTING Public/Granted day:2019-10-17
Information query
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