- 专利标题: Projective MEMS device for a picoprojector of the flying spot type and related manufacturing method
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申请号: US16007951申请日: 2018-06-13
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公开(公告)号: US10895740B2公开(公告)日: 2021-01-19
- 发明人: Guido Chiaretti , Fabio Luigi Grilli , Roberto Carminati , Bruno Murari , Lorenzo Sarchi
- 申请人: STMICROELECTRONICS S.R.L.
- 申请人地址: IT Agrate Brianza
- 专利权人: STMICROELECTRONICS S.R.L.
- 当前专利权人: STMICROELECTRONICS S.R.L.
- 当前专利权人地址: IT Agrate Brianza
- 代理机构: Seed IP Law Group LLP
- 优先权: IT102016000028779 20160318
- 主分类号: G02B26/10
- IPC分类号: G02B26/10 ; H01S5/022 ; G02B6/35 ; G03B21/28 ; H04N9/31 ; G02B6/42
摘要:
A projective MEMS device, including: a fixed supporting structure made at least in part of semiconductor material; and a number of projective modules. Each projective module includes an optical source, fixed to the fixed supporting structure, and a microelectromechanical actuator, which includes a mobile structure and varies the position of the mobile structure with respect to the fixed supporting structure. Each projective module further includes an initial optical fiber, which is mechanically coupled to the mobile structure and optically couples to the optical source according to the position of the mobile structure.
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