公开(公告)号：US10895740B2

公开(公告)日：2021-01-19

申请号：US16007951

申请日：2018-06-13

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Guido Chiaretti ,  Fabio Luigi Grilli ,  Roberto Carminati ,  Bruno Murari ,  Lorenzo Sarchi

IPC: G02B26/10 ,  H01S5/022 ,  G02B6/35 ,  G03B21/28 ,  H04N9/31 ,  G02B6/42

Abstract: A projective MEMS device, including: a fixed supporting structure made at least in part of semiconductor material; and a number of projective modules. Each projective module includes an optical source, fixed to the fixed supporting structure, and a microelectromechanical actuator, which includes a mobile structure and varies the position of the mobile structure with respect to the fixed supporting structure. Each projective module further includes an initial optical fiber, which is mechanically coupled to the mobile structure and optically couples to the optical source according to the position of the mobile structure.

公开(公告)号：US10018835B2

公开(公告)日：2018-07-10

申请号：US15280704

申请日：2016-09-29

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Guido Chiaretti ,  Fabio Luigi Grilli ,  Roberto Carminati ,  Bruno Murari ,  Lorenzo Sarchi

IPC: G02B26/10 ,  H04N9/31 ,  G03B21/28

CPC classification number: G02B26/103 ,  G02B6/0006 ,  G02B6/322 ,  G02B6/3502 ,  G02B6/3506 ,  G02B6/3508 ,  G02B6/4202 ,  G02B6/4225 ,  G02B6/4226 ,  G03B21/28 ,  H01S5/02284 ,  H04N9/3129

Abstract: A projective MEMS device, including: a fixed supporting structure made at least in part of semiconductor material; and a number of projective modules. Each projective module includes an optical source, fixed to the fixed supporting structure, and a microelectromechanical actuator, which includes a mobile structure and varies the position of the mobile structure with respect to the fixed supporting structure. Each projective module further includes an initial optical fiber, which is mechanically coupled to the mobile structure and optically couples to the optical source according to the position of the mobile structure.

公开(公告)号：US20170269355A1

公开(公告)日：2017-09-21

申请号：US15280704

申请日：2016-09-29

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Guido Chiaretti ,  Fabio Luigi Grilli ,  Roberto Carminati ,  Bruno Murari ,  Lorenzo Sarchi

IPC: G02B26/10 ,  G03B21/28 ,  H04N9/31

CPC classification number: G02B26/103 ,  G02B6/0006 ,  G02B6/322 ,  G02B6/3502 ,  G02B6/3506 ,  G02B6/3508 ,  G02B6/4202 ,  G02B6/4225 ,  G02B6/4226 ,  G03B21/28 ,  H01S5/02284 ,  H04N9/3129

Abstract: A projective MEMS device, including: a fixed supporting structure made at least in part of semiconductor material; and a number of projective modules. Each projective module includes an optical source, fixed to the fixed supporting structure, and a microelectromechanical actuator, which includes a mobile structure and varies the position of the mobile structure with respect to the fixed supporting structure. Each projective module further includes an initial optical fiber, which is mechanically coupled to the mobile structure and optically couples to the optical source according to the position of the mobile structure.