Invention Grant
- Patent Title: Film forming apparatus
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Application No.: US16118734Application Date: 2018-08-31
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Publication No.: US10896831B2Publication Date: 2021-01-19
- Inventor: Kunihiko Suzuki , Naohisa Ikeya , Keisuke Fukada , Masahiko Ito , Isaho Kamata , Hidekazu Tsuchida , Hiroaki Fujibayashi , Hideyuki Uehigashi , Masami Naito , Kazukuni Hara , Hirofumi Aoki , Takahiro Kozawa
- Applicant: NUFLARE TECHNOLOGY, INC. , SHOWA DENKO K.K. , CENTRAL RESEARCH INSTITUTE OF ELECTRIC POWER INDUSTRY
- Applicant Address: JP Yokohama; JP Tokyo-to; JP Tokyo-to
- Assignee: NUFLARE TECHNOLOGY, INC.,SHOWA DENKO K.K.,CENTRAL RESEARCH INSTITUTE OF ELECTRIC POWER INDUSTRY
- Current Assignee: NUFLARE TECHNOLOGY, INC.,SHOWA DENKO K.K.,CENTRAL RESEARCH INSTITUTE OF ELECTRIC POWER INDUSTRY
- Current Assignee Address: JP Yokohama; JP Tokyo-to; JP Tokyo-to
- Agency: Finnegan, Henderson, Farabow, Garrett & Dunner, L.L.P.
- Priority: JP2016-039270 20160301
- Main IPC: C23C16/40
- IPC: C23C16/40 ; H01L21/67 ; H01L21/205 ; C23C16/455 ; B01F3/02 ; H01L21/02

Abstract:
A supply part includes a first partition, a second partition under the first partition, a third partition under the second partition, a first flow path between the first partition and the second partition allowing a first gas to be introduced therein, a second flow path between the second partition and the third partition allowing a second gas to be introduced therein, a first piping extending from the second partition to reach below the third partition and being communicated with the first flow path, a second piping extending from the third partition to reach below the third partition and being communicated with the second flow path, and a convex portion provided on an outer circumferential surface of the first piping or an inner circumferential surface of the second piping protruding from one of the outer circumferential surface and the inner circumferential surface toward the other one.
Public/Granted literature
- US20180374721A1 FILM FORMING APPARTUS Public/Granted day:2018-12-27
Information query
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