Invention Grant
- Patent Title: Pellicle for photomask, reticle including the same, and exposure apparatus for lithography
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Application No.: US16708969Application Date: 2019-12-10
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Publication No.: US10928723B2Publication Date: 2021-02-23
- Inventor: Hyeonjin Shin , Hyunjae Song , Seongjun Park , Keunwook Shin , Changseok Lee , Dongwook Lee , Minsu Seol , Sangwon Kim , Seongjun Jeong
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: KR10-2016-0162297 20161130
- Main IPC: G03F1/64
- IPC: G03F1/64 ; G03F1/62 ; G03F1/22

Abstract:
A pellicle for a photomask, a reticle including the same, and an exposure apparatus for lithography are provided. The pellicle may include a pellicle membrane, and the pellicle membrane may include nanocrystalline graphene. The nanocrystalline graphene may have defects. The nanocrystalline graphene may include a plurality of nanoscale crystal grains, and the nanoscale crystal grains may include a two-dimensional (2D) carbon structure having an aromatic ring structure. The defects of the nanocrystalline graphene may include at least one of an sp3 carbon atom, an oxygen atom, a nitrogen atom, or a carbon vacancy.
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