Invention Grant
- Patent Title: Coating apparatus and coating method
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Application No.: US15935111Application Date: 2018-03-26
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Publication No.: US10981184B2Publication Date: 2021-04-20
- Inventor: Soon Cheon Cho , Bongkyu Shin , Hyun Joong Kim
- Applicant: SEMES CO., LTD.
- Applicant Address: KR Chungcheongnam-do
- Assignee: SEMES CO., LTD.
- Current Assignee: SEMES CO., LTD.
- Current Assignee Address: KR Chungcheongnam-do
- Agency: Li & Cai Intellectual Property (USA) Office
- Priority: KR10-2017-0038701 20170327
- Main IPC: B05B5/025
- IPC: B05B5/025 ; B05C5/02 ; B05B17/04 ; B05B5/08 ; B05B7/22 ; B05B5/00 ; B05D1/04 ; B05D3/00 ; B05D3/14

Abstract:
Disclosed are a coating apparatus and a coating method. The coating apparatus includes a chamber, a support located in an interior space of the chamber and configured to support a substrate which is to be coated, an ejection nozzle configured to eject a coating material toward the support, and an electric field forming unit configured to form an electric field in a movement path of the coating material to provide kinetic energy for the coating material.
Public/Granted literature
- US20180272366A1 COATING APPARATUS AND COATING METHOD Public/Granted day:2018-09-27
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