A first TS is coupled to first S/D over first fin, second TS coupled to second S/D over first fin, third TS coupled to third S/D over second fin, fourth TS coupled to fourth S/D over second fin, gate metal over first and second fins, and gate cap over gate metal. First TS cap is on first TS, second TS cap on second TS, third TS cap on third TS, and fourth TS cap on fourth TS. ILD is formed on top of gate cap and first through fourth TS caps. First opening is through ILD and second TS cap such that part of gate metal is exposed, after removing part of gate cap. Second opening is through ILD to expose another part of gate metal. Combined gate metal contact and local metal connection is formed in first opening and individual gate metal contact is formed in second opening.