Invention Grant
- Patent Title: Cold fluid semiconductor device release during pick and place operations, and associated systems and methods
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Application No.: US16460956Application Date: 2019-07-02
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Publication No.: US10998208B2Publication Date: 2021-05-04
- Inventor: Jeremy E. Minnich , Benjamin L. McClain , Travis M. Jensen
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Perkins Coie LLP
- Main IPC: H01L21/67
- IPC: H01L21/67 ; H01L21/683 ; H05K13/00 ; B28D5/00 ; H05K13/04

Abstract:
Systems and methods for releasing semiconductor dies during pick and place operations are disclosed. In one embodiment, a system for handling semiconductor dies comprises a support member positioned to carry at least one semiconductor die releasably attached to a support substrate. The system further includes a picking device having a pick head coupleable to a vacuum source and positioned to releasably attach to the semiconductor die at a pick station. The system still further includes a cooling member coupleable to a cold fluid source and configured to direct a cold fluid supplied by the cold fluid source toward the support substrate at the pick station. The cold fluid cools a die attach region of the substrate where the semiconductor die is attached to the substrate to facilitate removal of the semiconductor die.
Public/Granted literature
Information query
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