Invention Grant
- Patent Title: Three-dimensional flat NAND memory device including wavy word lines and method of making the same
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Application No.: US16423500Application Date: 2019-05-28
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Publication No.: US11018151B2Publication Date: 2021-05-25
- Inventor: Ryosuke Kaneko
- Applicant: SANDISK TECHNOLOGIES LLC
- Applicant Address: US TX Addison
- Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee Address: US TX Addison
- Agency: The Marbury Law Group PLLC
- Main IPC: H01L29/00
- IPC: H01L29/00 ; H01L27/11582 ; H01L27/11524 ; H01L27/11556 ; H01L27/11519 ; H01L27/1157 ; H01L27/11565 ; H01L21/768 ; H01L23/528 ; H01L21/311 ; H01L23/522 ; H01L21/28

Abstract:
A three-dimensional memory device includes alternating stacks of insulating strips and electrically conductive strips located over a substrate, generally extending along a first horizontal direction, and laterally spaced apart from each other along a second horizontal direction by width-modulated line trenches, memory films located on a respective sidewall of the alternating stacks, the memory films containing a charge storage layer and blocking dielectric which generally extend along the first horizontal direction and laterally undulate along the second horizontal direction, and a plurality of discrete vertical semiconductor channels located on a sidewall of a respective one of the memory films.
Public/Granted literature
- US20200098787A1 THREE-DIMENSIONAL FLAT NAND MEMORY DEVICE INCLUDING WAVY WORD LINES AND METHOD OF MAKING THE SAME Public/Granted day:2020-03-26
Information query
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