Invention Grant
- Patent Title: Selective internal gate structure for ferroelectric semiconductor devices
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Application No.: US16549245Application Date: 2019-08-23
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Publication No.: US11018256B2Publication Date: 2021-05-25
- Inventor: Cheng-Ming Lin , Sai-Hooi Yeong , Ziwei Fang , Chi On Chui , Huang-Lin Chao
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Sterne, Kessler, Goldstein & Fox P.L.L.C.
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L29/51 ; H01L29/66 ; H01L21/28 ; H01L21/02

Abstract:
The present disclosure relates to a semiconductor device including a substrate and first and second spacers on the substrate. The semiconductor device also includes a gate stack between the first and second spacers. The gate stack includes a gate dielectric layer having a first portion formed on the substrate and a second portion formed on the first and second spacers; an internal gate formed on the first and second portions of the gate dielectric layer; a ferroelectric dielectric layer formed on the internal gate and in contact with the gate dielectric layer; and a gate electrode on the ferroelectric dielectric layer.
Public/Granted literature
- US20210057581A1 SELECTIVE INTERNAL GATE STRUCTURE FOR FERROELECTRIC SEMICONDUCTOR DEVICES Public/Granted day:2021-02-25
Information query
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