Invention Grant
- Patent Title: Piezoelectric device, piezoelectric transformer, and method of manufacturing piezoelectric device
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Application No.: US15795579Application Date: 2017-10-27
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Publication No.: US11018292B2Publication Date: 2021-05-25
- Inventor: Shinsuke Ikeuchi , Kansho Yamamoto , Takuo Hada , Yoichi Mochida , Hideya Horiuchi
- Applicant: Murata Manufacturing Co., Ltd.
- Applicant Address: JP Nagaokakyo
- Assignee: Murata Manufacturing Co., Ltd.
- Current Assignee: Murata Manufacturing Co., Ltd.
- Current Assignee Address: JP Nagaokakyo
- Agency: Arent Fox LLP
- Priority: JPJP2015-093091 20150430
- Main IPC: H01L41/09
- IPC: H01L41/09 ; H01L41/107 ; H01L41/047 ; H01L41/04 ; H01L41/31 ; H01L41/083 ; H01L41/187 ; H01L41/314 ; H04R17/00

Abstract:
A piezoelectric device that includes a base member having an opening therein and an upper layer supported by the base member. The upper layer includes a vibration portion at a location corresponding to the opening in the base member. The vibration portion includes a lower electrode, an intermediate electrode and an upper electrode that are spaced apart from one another in a thickness direction of the piezoelectric device. The upper layer includes a first piezoelectric layer disposed so as to be at least partially sandwiched between the lower electrode and the intermediate electrode, and a second piezoelectric layer disposed so as to overlap with the first piezoelectric layer and so as to be at least partially sandwiched between the intermediate electrode and the upper electrode. The first piezoelectric layer and the second piezoelectric layer are different in relative permittivity in the thickness direction of the piezoelectric device.
Public/Granted literature
- US20180069168A1 PIEZOELECTRIC DEVICE, PIEZOELECTRIC TRANSFORMER, AND METHOD OF MANUFACTURING PIEZOELECTRIC DEVICE Public/Granted day:2018-03-08
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