公开(公告)号：US20190172996A1

公开(公告)日：2019-06-06

申请号：US16273191

申请日：2019-02-12

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Shinsuke Ikeuchi ,  Yoichi Mochida ,  Kansho Yamamoto ,  Takuo Hada ,  Hideya Horiuchi

IPC: H01L41/257 ,  H01L41/107 ,  H01L41/047 ,  H01L41/083 ,  H01L41/29

Abstract: A piezoelectric transformer that includes a vibration portion assembly having an output electrode, an output-side intermediate electrode, an input-side intermediate electrode, and an input electrode. The vibration portion assembly includes n vibration portions. The input electrode includes one to n input electrode pieces. The output electrode includes one to n output electrode pieces. Wiring lines are arranged such that voltages of opposite phases can be respectively applied to a first input electrode piece group of the input electrode pieces corresponding to odd-numbered vibration portions, and a second input electrode piece group of the input electrode pieces corresponding to even-numbered vibration portions. The second output electrode piece and the first output-side intermediate electrode piece are superposed with each other in the thickness direction. The first output electrode piece is not superposed with either of the first and second output-side intermediate electrode pieces in the thickness direction.

公开(公告)号：US11195984B2

公开(公告)日：2021-12-07

申请号：US16243171

申请日：2019-01-09

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Shinsuke Ikeuchi ,  Yoichi Mochida ,  Kansho Yamamoto ,  Takuo Hada ,  Hideya Horiuchi

IPC: H01L41/107 ,  H01L41/187 ,  H01L41/047 ,  H01L41/053 ,  H01L41/293 ,  H01L41/314 ,  H01L41/318 ,  H01L41/332

Abstract: A piezoelectric transformer that includes a base and an upper layer supported by the base. The upper layer includes a first piezoelectric layer that includes the portion of the upper layer that is interposed between an output electrode and an intermediate electrode, and a second piezoelectric layer that is superposed with the first piezoelectric layer and includes the portion of the upper layer interposed between the intermediate electrode and an input electrode in at least n vibration portions. Moreover, the input electrode includes multiple input electrode pieces and the output electrode includes multiple output electrode pieces. In addition, wiring lines are routed such that voltages of opposite phases can be respectively applied to a first input electrode piece group and a second input electrode piece group with the potential of the intermediate electrode serving as a reference.

公开(公告)号：US09383205B2

公开(公告)日：2016-07-05

申请号：US14148964

申请日：2014-01-07

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Katsumi Fujimoto ,  Toshimaro Yoneda ,  Takuo Hada ,  Hideya Horiuchi

IPC: G01C19/56 ,  G01C19/5607 ,  G01C19/5621 ,  H01L41/09

CPC classification number: G01C19/56 ,  G01C19/5607 ,  G01C19/5621 ,  H01L41/09 ,  Y10T74/12 ,  Y10T74/18856

Abstract: A vibrator includes first and second circular or substantially circular arc-shaped beam portions, a base end-side weight portion, and a base end-side weight portion joining portion. The end portions of the first and second circular or substantially circular arc-shaped beam portions in an X-axis positive direction face each other across a distance in a Y-axis direction, and the end portions thereof in an X-axis negative direction are joined to each other. The base end-side weight portion is disposed between the first and second circular or substantially circular arc-shaped beam portions. The base end-side weight portion joining portion extends from a joining portion between the first circular or substantially circular arc-shaped beam portion and the second circular or substantially circular arc-shaped beam portion in the X-axis positive direction, and joined to the base end-side weight portion.

Abstract translation: 振动器包括第一和第二圆形或大致圆形的弧形梁部分，基端侧配重部分和基端侧配重部分接合部分。 第一和第二圆形或大致圆弧形的梁部分在X轴正方向上的端部在Y轴方向上的距离彼此相对，并且其端部在X轴负方向上是 相互加入 基端侧配重部分设置在第一和第二圆形或大致圆弧形的梁部分之间。 基端侧配重部接合部从第一圆弧状或大致圆弧状的梁部与第二圆形或大致圆弧状的梁部在X轴正方向上的接合部延伸，并与 基端侧配重部。

公开(公告)号：US11233190B2

公开(公告)日：2022-01-25

申请号：US16273191

申请日：2019-02-12

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Shinsuke Ikeuchi ,  Yoichi Mochida ,  Kansho Yamamoto ,  Takuo Hada ,  Hideya Horiuchi

IPC: H01L41/257 ,  H01L41/047 ,  H01L41/107 ,  H02N2/18 ,  B06B1/06 ,  H01L41/083 ,  H01L41/29

Abstract: A piezoelectric transformer that includes a vibration portion assembly having an output electrode, an output-side intermediate electrode, an input-side intermediate electrode, and an input electrode. The vibration portion assembly includes n vibration portions. The input electrode includes one to n input electrode pieces. The output electrode includes one to n output electrode pieces. Wiring lines are arranged such that voltages of opposite phases can be respectively applied to a first input electrode piece group of the input electrode pieces corresponding to odd-numbered vibration portions, and a second input electrode piece group of the input electrode pieces corresponding to even-numbered vibration portions. The second output electrode piece and the first output-side intermediate electrode piece are superposed with each other in the thickness direction. The first output electrode piece is not superposed with either of the first and second output-side intermediate electrode pieces in the thickness direction.

公开(公告)号：US11018292B2

公开(公告)日：2021-05-25

申请号：US15795579

申请日：2017-10-27

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Shinsuke Ikeuchi ,  Kansho Yamamoto ,  Takuo Hada ,  Yoichi Mochida ,  Hideya Horiuchi

IPC: H01L41/09 ,  H01L41/107 ,  H01L41/047 ,  H01L41/04 ,  H01L41/31 ,  H01L41/083 ,  H01L41/187 ,  H01L41/314 ,  H04R17/00

Abstract: A piezoelectric device that includes a base member having an opening therein and an upper layer supported by the base member. The upper layer includes a vibration portion at a location corresponding to the opening in the base member. The vibration portion includes a lower electrode, an intermediate electrode and an upper electrode that are spaced apart from one another in a thickness direction of the piezoelectric device. The upper layer includes a first piezoelectric layer disposed so as to be at least partially sandwiched between the lower electrode and the intermediate electrode, and a second piezoelectric layer disposed so as to overlap with the first piezoelectric layer and so as to be at least partially sandwiched between the intermediate electrode and the upper electrode. The first piezoelectric layer and the second piezoelectric layer are different in relative permittivity in the thickness direction of the piezoelectric device.

公开(公告)号：US20190148619A1

公开(公告)日：2019-05-16

申请号：US16243171

申请日：2019-01-09

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Shinsuke Ikeuchi ,  Yoichi Mochida ,  Kansho Yamamoto ,  Takuo Hada ,  Hideya Horiuchi

IPC: H01L41/107 ,  H01L41/047 ,  H01L41/053

Abstract: A piezoelectric transformer that includes a base and an upper layer supported by the base. The upper layer includes a first piezoelectric layer that includes the portion of the upper layer that is interposed between an output electrode and an intermediate electrode, and a second piezoelectric layer that is superposed with the first piezoelectric layer and includes the portion of the upper layer interposed between the intermediate electrode and an input electrode in at least n vibration portions. Moreover, the input electrode includes multiple input electrode pieces and the output electrode includes multiple output electrode pieces. In addition, wiring lines are routed such that voltages of opposite phases can be respectively applied to a first input electrode piece group and a second input electrode piece group with the potential of the intermediate electrode serving as a reference.

公开(公告)号：US09851373B2

公开(公告)日：2017-12-26

申请号：US14100100

申请日：2013-12-09

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Katsumi Fujimoto ,  Toshimaro Yoneda ,  Takuo Hada ,  Hideya Horiuchi

IPC: G01C19/56 ,  G01C19/5684

CPC classification number: G01P9/04 ,  G01C19/5684

Abstract: A vibrator in a vibrating gyroscope includes a circular annular portion, a rectangular annular portion, and joining portions. The rectangular annular portion is disposed adjacent to an outer side of the circular annular portion. The joining portions join the circular annular portion and the rectangular annular portion. The rectangular annular portion includes linear beam portions. The joining portions join the circular annular portion and the center portions of the beam portions to each other.

公开(公告)号：US09753057B2

公开(公告)日：2017-09-05

申请号：US14499324

申请日：2014-09-29

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Takuo Hada ,  Katsumi Fujimoto ,  Hideya Horiuchi ,  Toshimaro Yoneda

IPC: G01P15/097 ,  G01P15/10 ,  G01P15/09 ,  G01P15/08

CPC classification number: G01P15/10 ,  G01P15/09 ,  G01P15/097 ,  G01P2015/0828

Abstract: An acceleration sensor includes a fixation member, a weight member including a plate with two opposing sides parallel or substantially parallel to an X-direction and two opposing sides parallel to a Y-axis direction in a plan view, the weight member including a cutout extending in a direction about 45° relative to the X and Y axis directions, a vibrating beam linearly extending in the direction about 45° relative to the X and Y axis directions in the plan view, and one end portion is connected to the fixation member and the other end portion is connected to the weight member, the vibrating beam is partly arranged within the cutout and supporting the weight member to be displaceable in a Z-axis direction, a driver disposed on the vibrating beam and vibrating the vibrating beam, and a detector disposed on the vibrating beam and outputting a detection signal that is changed depending on deformation of the vibrating beam.

公开(公告)号：US09753056B2

公开(公告)日：2017-09-05

申请号：US14501109

申请日：2014-09-30

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Takuo Hada ,  Katsumi Fujimoto ,  Hideya Horiuchi ,  Toshimaro Yoneda

IPC: G01P15/097 ,  G01P15/09 ,  G01P15/10 ,  G01P15/08

CPC classification number: G01P15/097 ,  G01P15/09 ,  G01P15/10 ,  G01P2015/0814

Abstract: A weight member includes two sides opposite to each other in an X-axis direction when looked at in a plan view. A vibrating beam includes one end portion connected at one location to a fixation member and the other end portion connected at one location to one of the two sides of the weight member in the X-axis direction when looked at in a plan view. The vibrating beam supports the weight member to be displaceable in the X-axis direction. A holding beam includes one end portion connected at one location to the fixation member and the other end portion connected at one location to the other of the two sides of the weight member opposing to each other in the X-axis direction when looked at in a plan view. The holding beam supports the weight member to be displaceable in the X-axis direction. A driver is disposed on the vibrating beam and vibrates the vibrating beam. A detector is disposed on the vibrating beam and configured to output a detection signal changes according to deformation of the vibrating beam.