Invention Grant
- Patent Title: Integrated circuit device having a work function control layer with a step portion located on an element isolation layer
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Application No.: US16703908Application Date: 2019-12-05
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Publication No.: US11031392B2Publication Date: 2021-06-08
- Inventor: Yongho Jeon , Sekoo Kang , Sungwoo Myung , Keunhee Bai
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Agency: Muir Patent Law, PLLC
- Priority: KR10-2019-0033740 20190325
- Main IPC: H01L27/088
- IPC: H01L27/088 ; H01L29/49 ; H01L29/423 ; H01L29/51 ; H01L29/66 ; H01L29/06 ; H01L29/786 ; H01L27/092 ; H01L21/8238 ; H01L21/033 ; H01L21/84 ; H01L21/28 ; H01L27/12

Abstract:
An integrated circuit device includes a first fin-type active area and a second fin-type active area protruding from a substrate and extending in a first direction, an element isolation layer between the first and second fin-type active areas on the substrate, first semiconductor patterns being on a top surface of the first fin-type active area and having channel areas, second semiconductor patterns being on a top surface of the second fin-type active area and having channel areas, a first gate structure extending on the first fin-type active area in a second direction and including a first work function control layer surrounding the first semiconductor patterns and comprising a step portion on the element isolation layer, and a second gate structure extending on the second fin-type active area in the second direction and including a second work function control layer surrounding the second semiconductor patterns.
Public/Granted literature
- US20200312844A1 INTEGRATED CIRCUIT DEVICE Public/Granted day:2020-10-01
Information query
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