- 专利标题: Techniques for MRAM MTJ top electrode connection
-
申请号: US16408815申请日: 2019-05-10
-
公开(公告)号: US11075335B2公开(公告)日: 2021-07-27
- 发明人: Harry-Hak-Lay Chuang , Chen-Pin Hsu , Hung Cho Wang , Wen-Chun You , Sheng-Chang Chen , Tsun Chung Tu , Jiunyu Tsai , Sheng-Huang Huang
- 申请人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 申请人地址: TW Hsin-Chu
- 专利权人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 当前专利权人地址: TW Hsin-Chu
- 代理机构: Eschweiler & Potashnik, LLC
- 主分类号: H01L21/768
- IPC分类号: H01L21/768 ; H01L43/12 ; H01L43/02 ; H01F10/32 ; H01L27/22 ; H01L23/528 ; H01F41/32 ; H01L23/522
摘要:
Some embodiments relate to a method for manufacturing a memory device. The method includes forming a first masking layer disposed over a dielectric layer, the first masking layer exhibiting sidewalls defining an opening disposed above a magnetoresistive random-access memory (MRAM) cell located in an embedded memory region. A first etch is performed to form a first via opening within the dielectric layer above the MRAM cell. A top electrode via layer formed over the MRAM cell and the dielectric layer. A first planarization process performed on the top electrode via layer to remove part of the top electrode via layer and define a top electrode via having a substantially flat top surface.
公开/授权文献
- US20200098982A1 TECHNIQUES FOR MRAM MTJ TOP ELECTRODE CONNECTION 公开/授权日:2020-03-26
信息查询
IPC分类: