Invention Grant
- Patent Title: Techniques for MRAM MTJ top electrode connection
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Application No.: US16408815Application Date: 2019-05-10
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Publication No.: US11075335B2Publication Date: 2021-07-27
- Inventor: Harry-Hak-Lay Chuang , Chen-Pin Hsu , Hung Cho Wang , Wen-Chun You , Sheng-Chang Chen , Tsun Chung Tu , Jiunyu Tsai , Sheng-Huang Huang
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: H01L21/768
- IPC: H01L21/768 ; H01L43/12 ; H01L43/02 ; H01F10/32 ; H01L27/22 ; H01L23/528 ; H01F41/32 ; H01L23/522

Abstract:
Some embodiments relate to a method for manufacturing a memory device. The method includes forming a first masking layer disposed over a dielectric layer, the first masking layer exhibiting sidewalls defining an opening disposed above a magnetoresistive random-access memory (MRAM) cell located in an embedded memory region. A first etch is performed to form a first via opening within the dielectric layer above the MRAM cell. A top electrode via layer formed over the MRAM cell and the dielectric layer. A first planarization process performed on the top electrode via layer to remove part of the top electrode via layer and define a top electrode via having a substantially flat top surface.
Public/Granted literature
- US20200098982A1 TECHNIQUES FOR MRAM MTJ TOP ELECTRODE CONNECTION Public/Granted day:2020-03-26
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