Invention Grant
- Patent Title: Apparatus for supplying chemical liquid
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Application No.: US16532986Application Date: 2019-08-06
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Publication No.: US11121007B2Publication Date: 2021-09-14
- Inventor: Jae-Youl Kim , Jeeyong Jung , Young Ho Seo , Dae Sung Kim , Beomjeong Oh , Kwangbok Jun , Hyungoo Kwon , Sanguk Son
- Applicant: Semes Co., Ltd.
- Applicant Address: KR Cheonan-si
- Assignee: Semes Co., Ltd.
- Current Assignee: Semes Co., Ltd.
- Current Assignee Address: KR Cheonan-si
- Agency: Daly, Crowley, Mofford & Durkee, LLP
- Priority: KR10-2018-0114607 20180927
- Main IPC: H01L21/67
- IPC: H01L21/67 ; B05C5/02 ; B05C11/10
Abstract:
An apparatus for supplying chemical liquid may include a chemical liquid discharging member, a reservoir, a chemical liquid supplying member and a chemical liquid circulating member. The chemical liquid discharging member may discharge a chemical liquid onto a substrate. The reservoir may store the chemical liquid supplied to the chemical liquid discharging member. The chemical liquid supplying member may supply the chemical liquid stored in the reservoir. The chemical liquid circulating member may circulate the chemical liquid from the chemical liquid discharging member to the reservoir.
Information query
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