公开(公告)号：US11312127B2

公开(公告)日：2022-04-26

申请号：US16868633

申请日：2020-05-07

Applicant: Semes Co., Ltd.

Inventor： Chulwoo Kim ,  Beomjeong Oh

IPC: B41J2/045

Abstract: An apparatus for discharging chemical liquid may include an ink jet head, a gantry and a control member. The ink jet head may include a plurality of nozzles capable of discharging chemical liquid onto a substrate. The gantry may hold the ink jet head to place the ink jet head over the substrate. The control member may control the ink jet head such that discharge times of the chemical liquid from the nozzles of the ink jet head may be changed.

公开(公告)号：US11485132B2

公开(公告)日：2022-11-01

申请号：US16933029

申请日：2020-07-20

Applicant: Semes Co., Ltd.

Inventor： Chulwoo Kim ,  Sanghwa Lee ,  Beomjeong Oh

IPC: B41J2/045

Abstract: In a printing method using an ink jet head, a chemical liquid may be discharged onto a substrate from a plurality of nozzles of the ink jet head. Discharging numbers of the chemical liquid from the plurality of nozzles may be identified and a cumulative discharging number of the chemical liquid from the plurality of nozzles may be calculated. The cumulative discharging number of the chemical liquid may be compared with a previously set limit discharging number of the ink jet head. A replacement time of the ink jet head may be determined if the cumulative discharging number of the chemical liquid exceeds the previously set limit discharging number.

公开(公告)号：US11121007B2

公开(公告)日：2021-09-14

申请号：US16532986

申请日：2019-08-06

Applicant: Semes Co., Ltd.

Inventor： Jae-Youl Kim ,  Jeeyong Jung ,  Young Ho Seo ,  Dae Sung Kim ,  Beomjeong Oh ,  Kwangbok Jun ,  Hyungoo Kwon ,  Sanguk Son

IPC: H01L21/67 ,  B05C5/02 ,  B05C11/10

Abstract: An apparatus for supplying chemical liquid may include a chemical liquid discharging member, a reservoir, a chemical liquid supplying member and a chemical liquid circulating member. The chemical liquid discharging member may discharge a chemical liquid onto a substrate. The reservoir may store the chemical liquid supplied to the chemical liquid discharging member. The chemical liquid supplying member may supply the chemical liquid stored in the reservoir. The chemical liquid circulating member may circulate the chemical liquid from the chemical liquid discharging member to the reservoir.