公开(公告)号：US11121007B2

公开(公告)日：2021-09-14

申请号：US16532986

申请日：2019-08-06

Applicant: Semes Co., Ltd.

Inventor： Jae-Youl Kim ,  Jeeyong Jung ,  Young Ho Seo ,  Dae Sung Kim ,  Beomjeong Oh ,  Kwangbok Jun ,  Hyungoo Kwon ,  Sanguk Son

IPC: H01L21/67 ,  B05C5/02 ,  B05C11/10

Abstract: An apparatus for supplying chemical liquid may include a chemical liquid discharging member, a reservoir, a chemical liquid supplying member and a chemical liquid circulating member. The chemical liquid discharging member may discharge a chemical liquid onto a substrate. The reservoir may store the chemical liquid supplied to the chemical liquid discharging member. The chemical liquid supplying member may supply the chemical liquid stored in the reservoir. The chemical liquid circulating member may circulate the chemical liquid from the chemical liquid discharging member to the reservoir.

公开(公告)号：US20220105531A1

公开(公告)日：2022-04-07

申请号：US17483899

申请日：2021-09-24

Applicant: SEMES CO., LTD

Inventor： Jeeyong Jung ,  Dongyun Lee

IPC: B05B14/00 ,  B05B15/40

Abstract: An apparatus for supplying chemical liquid may include a chemical liquid supply head, a receiving member, a removing member and a supplying member. The chemical liquid supply head may provide a chemical liquid onto a substrate. The receiving member may receive a recycle chemical liquid discharged from the chemical liquid supply head, and the removing member may remove impurities remaining in the recycle chemical liquid received in the receiving member. The supplying member may provide the recycle chemical liquid from which the impurities are removed to the chemical liquid supply head.

公开(公告)号：US11759813B2

公开(公告)日：2023-09-19

申请号：US17483899

申请日：2021-09-24

Applicant: SEMES CO., LTD

Inventor： Jeeyong Jung ,  Dongyun Lee

IPC: B05B14/00 ,  B05B15/40

CPC classification number: B05B14/00 ,  B05B15/40

Abstract: An apparatus for supplying chemical liquid may include a chemical liquid supply head, a receiving member, a removing member and a supplying member. The chemical liquid supply head may provide a chemical liquid onto a substrate. The receiving member may receive a recycle chemical liquid discharged from the chemical liquid supply head, and the removing member may remove impurities remaining in the recycle chemical liquid received in the receiving member. The supplying member may provide the recycle chemical liquid from which the impurities are removed to the chemical liquid supply head.