Invention Grant
- Patent Title: Load port module
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Application No.: US14472678Application Date: 2014-08-29
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Publication No.: US11121017B2Publication Date: 2021-09-14
- Inventor: Daniel A. Hall , Glenn L. Sindledecker , Matthew W. Coady , Marcello Trolio , Michael Spinazola
- Applicant: Brooks Automation, Inc.
- Applicant Address: US MA Chelmsford
- Assignee: Brooks Automation, Inc.
- Current Assignee: Brooks Automation, Inc.
- Current Assignee Address: US MA Chelmsford
- Agency: Perman & Green, LLP
- Agent Colin C. Durham
- Main IPC: H01L21/677
- IPC: H01L21/677 ; H01L21/67 ; H01L21/673 ; B65G47/34
Abstract:
A substrate loading device having a frame, a cassette support, and a user interface. The frame is connected to a substrate processing apparatus. The frame has a transport opening through which substrates are transported between the device and processing apparatus. The cassette support is connected to the frame for holding at least one substrate holding cassette. The user interface is arranged for inputting information, and is mounted to the frame so that the user interface is integral with the frame.
Public/Granted literature
- US20140369793A1 LOAD PORT MODULE Public/Granted day:2014-12-18
Information query
IPC分类:
