公开(公告)号：US20140369793A1

公开(公告)日：2014-12-18

申请号：US14472678

申请日：2014-08-29

Applicant: Brooks Automation, Inc.

Inventor： Daniel A. Hall ,  Glenn L. Sindledecker ,  Matthew W. Coady ,  Marcello Trolio ,  Michael Spinazola

IPC: H01L21/677 ,  H01L21/67 ,  B65G47/34

CPC classification number: H01L21/67775 ,  B65G47/34 ,  H01L21/67265 ,  H01L21/67379 ,  H01L21/67772 ,  H01L2924/0002 ,  H01L2924/00

Abstract: A substrate loading device having a frame, a cassette support, and a user interface. The frame is connected to a substrate processing apparatus. The frame has a transport opening through which substrates are transported between the device and processing apparatus. The cassette support is connected to the frame for holding at least one substrate holding cassette. The user interface is arranged for inputting information, and is mounted to the frame so that the user interface is integral with the frame.

Abstract translation: 具有框架，盒支架和用户界面的基板装载装置。 框架连接到基板处理装置。 框架具有输送开口，基板通过该输送开口在装置和处理装置之间传送。 盒支撑件连接到框架，用于保持至少一个基板保持盒。 用户界面被布置用于输入信息，并且被安装到框架，使得用户界面与框架一体。

公开(公告)号：US11121017B2

公开(公告)日：2021-09-14

申请号：US14472678

申请日：2014-08-29

Applicant: Brooks Automation, Inc.

Inventor： Daniel A. Hall ,  Glenn L. Sindledecker ,  Matthew W. Coady ,  Marcello Trolio ,  Michael Spinazola

IPC: H01L21/677 ,  H01L21/67 ,  H01L21/673 ,  B65G47/34

Abstract: A substrate loading device having a frame, a cassette support, and a user interface. The frame is connected to a substrate processing apparatus. The frame has a transport opening through which substrates are transported between the device and processing apparatus. The cassette support is connected to the frame for holding at least one substrate holding cassette. The user interface is arranged for inputting information, and is mounted to the frame so that the user interface is integral with the frame.