Invention Grant
- Patent Title: Three-dimensional memory device containing direct contact drain-select-level semiconductor channel portions and methods of making the same
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Application No.: US16211387Application Date: 2018-12-06
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Publication No.: US11121149B2Publication Date: 2021-09-14
- Inventor: Hiroyuki Tanaka , Sayako Nagamine , Akihisa Sai
- Applicant: SANDISK TECHNOLOGIES LLC
- Applicant Address: US TX Addison
- Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee Address: US TX Addison
- Agency: The Marbury Law Group PLLC
- Main IPC: H01L27/11582
- IPC: H01L27/11582 ; H01L29/06 ; H01L27/11524 ; H01L27/1157 ; H01L29/423 ; H01L27/11556 ; H01L21/28 ; H01L21/02

Abstract:
An alternating stack of insulating layers and word-line-level spacer material layers is formed over a substrate. Memory opening fill structures including a respective memory film, a respective word-line-level semiconductor channel portion, a respective word-line-level dielectric core laterally, and a respective sacrificial dielectric material portion are formed through the alternating stack. Drain-select-level material layers are formed over the alternating stack and the memory opening fill structures. Drain-select-level openings are formed through the drain-select-level material layers and over the memory opening fill structures. The sacrificial dielectric material portions are removed selective to the word-line-level semiconductor channel portions underneath the drain-select-level openings. Drain-select-level semiconductor channel portions are formed directly on a respective one of the word-line-level semiconductor channel portions.
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Information query
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