- 专利标题: Semiconductor device and method of forming openings through insulating layer over encapsulant for enhanced adhesion of interconnect structure
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申请号: US15428007申请日: 2017-02-08
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公开(公告)号: US11127666B2公开(公告)日: 2021-09-21
- 发明人: Yaojian Lin , Kang Chen , Jianmin Fang
- 申请人: STATS ChipPAC Pte. Ltd.
- 申请人地址: SG Singapore
- 专利权人: STATS ChipPAC Pte. Ltd.
- 当前专利权人: STATS ChipPAC Pte. Ltd.
- 当前专利权人地址: SG Singapore
- 代理机构: Patent Law Group: Atkins and Associates, P.C.
- 代理商 Robert D. Atkins
- 主分类号: H01L23/498
- IPC分类号: H01L23/498 ; H01L21/56 ; H01L23/00 ; H01L23/538 ; H01L21/48 ; H01L23/31
摘要:
A semiconductor device has a semiconductor die mounted to a carrier. An encapsulant is deposited over the semiconductor die and carrier. The carrier is removed. A first insulating layer is formed over a portion of the encapsulant within an interconnect site outside a footprint of the semiconductor die. An opening is formed through the first insulating layer within the interconnect site to expose the encapsulant. The opening can be ring-shaped or vias around the interconnect site and within a central region of the interconnect site to expose the encapsulant. A first conductive layer is formed over the first insulating layer to follow a contour of the first insulating layer. A second conductive layer is formed over the first conductive layer and exposed encapsulant. A second insulating layer is formed over the second conductive layer. A bump is formed over the second conductive layer in the interconnect site.
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