Invention Grant
- Patent Title: Three-dimensional semiconductor chip containing memory die bonded to both sides of a support die and methods of making the same
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Application No.: US16848137Application Date: 2020-04-14
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Publication No.: US11127728B2Publication Date: 2021-09-21
- Inventor: Fei Zhou , Raghuveer S. Makala , Adarsh Rajashekhar , Rahul Sharangpani
- Applicant: SANDISK TECHNOLOGIES LLC
- Applicant Address: US TX Addison
- Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee Address: US TX Addison
- Agency: The Marbury Law Group PLLC
- Main IPC: G11C5/04
- IPC: G11C5/04 ; H01L25/18 ; H01L25/00 ; H01L23/00 ; H01L27/11556 ; H01L27/11582 ; G11C16/26 ; G11C16/08 ; G11C16/24 ; G11C16/30 ; H01L23/48

Abstract:
A support die includes complementary metal-oxide-semiconductor (CMOS) devices, front support-die bonding pads electrically connected to a first subset of the peripheral circuitry, and backside bonding structures electrically connected to a second subset of the peripheral circuitry. A first memory die including a first three-dimensional array of memory elements is bonded to the support die. First memory-die bonding pads of the first memory die are bonded to the front support-die bonding pads. A second memory die including a second three-dimensional array of memory elements is bonded to the support die. Second memory-die bonding pads of the second memory die are bonded to the backside bonding structures.
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