Invention Grant
- Patent Title: Control gate strap layout to improve a word line etch process window
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Application No.: US16248881Application Date: 2019-01-16
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Publication No.: US11127827B2Publication Date: 2021-09-21
- Inventor: Yu-Ling Hsu , Ping-Cheng Li , Hung-Ling Shih , Po-Wei Liu , Wen-Tuo Huang , Yong-Shiuan Tsair , Chia-Sheng Lin , Shih Kuang Yang
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: H01L29/423
- IPC: H01L29/423 ; H01L23/528 ; H01L23/522 ; H01L29/40 ; H01L21/265 ; H01L29/66 ; H01L29/788 ; H01L21/3213 ; H01L21/28

Abstract:
Various embodiments of the present application are directed towards a control gate layout to improve an etch process window for word lines. In some embodiments, an integrated chip comprises a memory array, an erase gate, a word line, and a control gate. The memory array comprises a plurality of cells in a plurality of rows and a plurality of columns. The erase gate and the word line are elongated in parallel along a row of the memory array. The control gate is elongated along the row and is between and borders the erase gate and the word line. Further, the control gate has a pad region protruding towards the erase gate and the word line. Because the pad region protrudes towards the erase gate and the word line, a width of the pad region is spread between word-line and erase-gate sides of the control gate.
Public/Granted literature
- US20200098877A1 CONTROL GATE STRAP LAYOUT TO IMPROVE A WORD LINE ETCH PROCESS WINDOW Public/Granted day:2020-03-26
Information query
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