公开(公告)号：US11127827B2

公开(公告)日：2021-09-21

申请号：US16248881

申请日：2019-01-16

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Yu-Ling Hsu ,  Ping-Cheng Li ,  Hung-Ling Shih ,  Po-Wei Liu ,  Wen-Tuo Huang ,  Yong-Shiuan Tsair ,  Chia-Sheng Lin ,  Shih Kuang Yang

IPC: H01L29/423 ,  H01L23/528 ,  H01L23/522 ,  H01L29/40 ,  H01L21/265 ,  H01L29/66 ,  H01L29/788 ,  H01L21/3213 ,  H01L21/28

Abstract: Various embodiments of the present application are directed towards a control gate layout to improve an etch process window for word lines. In some embodiments, an integrated chip comprises a memory array, an erase gate, a word line, and a control gate. The memory array comprises a plurality of cells in a plurality of rows and a plurality of columns. The erase gate and the word line are elongated in parallel along a row of the memory array. The control gate is elongated along the row and is between and borders the erase gate and the word line. Further, the control gate has a pad region protruding towards the erase gate and the word line. Because the pad region protrudes towards the erase gate and the word line, a width of the pad region is spread between word-line and erase-gate sides of the control gate.

公开(公告)号：US20200098877A1

公开(公告)日：2020-03-26

申请号：US16248881

申请日：2019-01-16

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Yu-Ling Hsu ,  Ping-Cheng Li ,  Hung-Ling Shih ,  Po-Wei Liu ,  Wen-Tuo Huang ,  Yong-Shiuan Tsair ,  Chia-Sheng Lin ,  Shih Kuang Yang

IPC: H01L29/423 ,  H01L23/528 ,  H01L23/522 ,  H01L21/28 ,  H01L21/3213 ,  H01L21/265 ,  H01L29/66 ,  H01L29/788 ,  H01L29/40

Abstract: Various embodiments of the present application are directed towards a control gate layout to improve an etch process window for word lines. In some embodiments, an integrated chip comprises a memory array, an erase gate, a word line, and a control gate. The memory array comprises a plurality of cells in a plurality of rows and a plurality of columns. The erase gate and the word line are elongated in parallel along a row of the memory array. The control gate is elongated along the row and is between and borders the erase gate and the word line. Further, the control gate has a pad region protruding towards the erase gate and the word line. Because the pad region protrudes towards the erase gate and the word line, a width of the pad region is spread between word-line and erase-gate sides of the control gate.

公开(公告)号：US20200003414A1

公开(公告)日：2020-01-02

申请号：US16389579

申请日：2019-04-19

Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.

Inventor： Ming-Hsun TSAI ,  Ping-Cheng Li ,  Yen-Hsun CHEN

IPC: F23G7/06 ,  F23G5/12 ,  F23G5/50 ,  H05G2/00

Abstract: An apparatus coupled to a chamber for processing extreme ultraviolet radiation includes a gas inlet configured to direct exhaust gases from the chamber into a combustion zone. The combustion zone is configured to flamelessly ignite the exhaust gases. An air inlet is configured to direct a mixture of air and a fuel into the combustion zone. A control valve is configured to change a volume of fluid exhausted from the combustion zone. A controller configured to control the control valve so as to prevent a pressure inside the combustion zone from exceeding a preset pressure value is provided.

公开(公告)号：US20210183875A1

公开(公告)日：2021-06-17

申请号：US17190678

申请日：2021-03-03

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Wen-Tuo Huang ,  Ping-Cheng Li ,  Hung-Ling Shih ,  Po-Wei Liu ,  Yu-Ling Hsu ,  Yong-Shiuan Tsair ,  Chia-Sheng Lin ,  Shih Kuang Yang

IPC: H01L27/11521 ,  H01L23/528 ,  H01L23/532 ,  H01L29/49 ,  H01L29/423 ,  H01L29/66 ,  H01L29/40 ,  H01L21/768 ,  H01L23/522 ,  H01L29/788 ,  H01L21/28

Abstract: Various embodiments of the present application are directed towards an integrated memory chip comprising a memory array with a strap-cell architecture that reduces the number of distinct strap-cell types and that reduces strap-line density. In some embodiments, the memory array is limited to three distinct types of strap cells: a source line/erase gate (SLEG) strap cell; a control gate/word line (CGWL) strap cell; and a word-line strap cell. The small number of distinct strap-cell types simplifies design of the memory array and further simplifies design of a corresponding interconnect structure. Further, in some embodiments, the three distinct strap-cell types electrically couple word lines, erase gates, and control gates to corresponding strap lines in different metallization layers of an interconnect structure. By spreading the strap lines amongst different metallization layers, strap-line density is reduced.

公开(公告)号：US20200105346A1

公开(公告)日：2020-04-02

申请号：US16400361

申请日：2019-05-01

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Shih Kuang Yang ,  Ping-Cheng Li ,  Hung-Ling Shih ,  Po-Wei Liu ,  Wen-Tuo Huang ,  Yu-Ling Hsu ,  Yong-Shiuan Tsair ,  Chia-Sheng Lin

IPC: G11C16/08 ,  G11C11/16 ,  H01L27/108

Abstract: Various embodiments of the present application are directed towards an integrated memory chip with an enhanced device-region layout for reduced leakage current and an enlarged word-line etch process window (e.g., enhanced word-line etch resiliency). In some embodiments, the integrated memory chip comprises a substrate, a control gate, a word line, and an isolation structure. The substrate comprises a first source/drain region. The control gate and the word line are on the substrate. The word line is between and borders the first source/drain region and the control gate and is elongated along a length of the word line. The isolation structure extends into the substrate and has a first isolation-structure sidewall. The first isolation-structure sidewall extends laterally along the length of the word line and underlies the word line.

公开(公告)号：US10514167B1

公开(公告)日：2019-12-24

申请号：US16389579

申请日：2019-04-19

Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.

Inventor： Ming-Hsun Tsai ,  Ping-Cheng Li ,  Yen-Hsun Chen

IPC: F23G7/06 ,  F23G5/12 ,  F23G5/50 ,  H05G2/00 ,  G03F7/20

Abstract: An apparatus coupled to a chamber for processing extreme ultraviolet radiation includes a gas inlet configured to direct exhaust gases from the chamber into a combustion zone. The combustion zone is configured to flamelessly ignite the exhaust gases. An air inlet is configured to direct a mixture of air and a fuel into the combustion zone. A control valve is configured to change a volume of fluid exhausted from the combustion zone. A controller configured to control the control valve so as to prevent a pressure inside the combustion zone from exceeding a preset pressure value is provided.

公开(公告)号：US11158377B2

公开(公告)日：2021-10-26

申请号：US16952411

申请日：2020-11-19

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Shih Kuang Yang ,  Ping-Cheng Li ,  Hung-Ling Shih ,  Po-Wei Liu ,  Wen-Tuo Huang ,  Yu-Ling Hsu ,  Yong-Shiuan Tsair ,  Chia-Sheng Lin

IPC: G11C16/08 ,  H01L27/108 ,  G11C11/16 ,  H01L27/11521

Abstract: Various embodiments of the present application are directed towards an integrated memory chip with an enhanced device-region layout for reduced leakage current and an enlarged word-line etch process window (e.g., enhanced word-line etch resiliency). In some embodiments, the integrated memory chip comprises a substrate, a control gate, a word line, and an isolation structure. The substrate comprises a first source/drain region. The control gate and the word line are on the substrate. The word line is between and borders the first source/drain region and the control gate and is elongated along a length of the word line. The isolation structure extends into the substrate and has a first isolation-structure sidewall. The first isolation-structure sidewall extends laterally along the length of the word line and underlies the word line.

公开(公告)号：US10943913B2

公开(公告)日：2021-03-09

申请号：US16364405

申请日：2019-03-26

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Wen-Tuo Huang ,  Ping-Cheng Li ,  Hung-Ling Shih ,  Po-Wei Liu ,  Yu-Ling Hsu ,  Yong-Shiuan Tsair ,  Chia-Sheng Lin ,  Shih Kuang Yang

IPC: H01L27/11521 ,  H01L23/528 ,  H01L23/532 ,  H01L29/49 ,  H01L29/423 ,  H01L29/66 ,  H01L29/40 ,  H01L21/768 ,  H01L23/522 ,  H01L29/788 ,  H01L21/28

Abstract: Various embodiments of the present application are directed towards an integrated memory chip comprising a memory array with a strap-cell architecture that reduces the number of distinct strap-cell types and that reduces strap-line density. In some embodiments, the memory array is limited to three distinct types of strap cells: a source line/erase gate (SLEG) strap cell; a control gate/word line (CGWL) strap cell; and a word-line strap cell. The small number of distinct strap-cell types simplifies design of the memory array and further simplifies design of a corresponding interconnect structure. Further, in some embodiments, the three distinct strap-cell types electrically couple word lines, erase gates, and control gates to corresponding strap lines in different metallization layers of an interconnect structure. By spreading the strap lines amongst different metallization layers, strap-line density is reduced.

公开(公告)号：US11552087B2

公开(公告)日：2023-01-10

申请号：US17190678

申请日：2021-03-03

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Wen-Tuo Huang ,  Ping-Cheng Li ,  Hung-Ling Shih ,  Po-Wei Liu ,  Yu-Ling Hsu ,  Yong-Shiuan Tsair ,  Chia-Sheng Lin ,  Shih Kuang Yang

IPC: H01L27/11521 ,  H01L23/528 ,  H01L23/532 ,  H01L29/49 ,  H01L29/423 ,  H01L29/66 ,  H01L29/40 ,  H01L21/768 ,  H01L23/522 ,  H01L29/788 ,  H01L21/28

Abstract: Various embodiments of the present application are directed towards an integrated memory chip comprising a memory array with a strap-cell architecture that reduces the number of distinct strap-cell types and that reduces strap-line density. In some embodiments, the memory array is limited to three distinct types of strap cells: a source line/erase gate (SLEG) strap cell; a control gate/word line (CGWL) strap cell; and a word-line strap cell. The small number of distinct strap-cell types simplifies design of the memory array and further simplifies design of a corresponding interconnect structure. Further, in some embodiments, the three distinct strap-cell types electrically couple word lines, erase gates, and control gates to corresponding strap lines in different metallization layers of an interconnect structure. By spreading the strap lines amongst different metallization layers, strap-line density is reduced.

公开(公告)号：US20210074360A1

公开(公告)日：2021-03-11

申请号：US16952411

申请日：2020-11-19

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Shih Kuang Yang ,  Ping-Cheng Li ,  Hung-Ling Shih ,  Po-Wei Liu ,  Wen-Tuo Huang ,  Yu-Ling Hsu ,  Yong-Shiuan Tsair ,  Chia-Sheng Lin

IPC: G11C16/08 ,  H01L27/108 ,  G11C11/16

Abstract: Various embodiments of the present application are directed towards an integrated memory chip with an enhanced device-region layout for reduced leakage current and an enlarged word-line etch process window (e.g., enhanced word-line etch resiliency). In some embodiments, the integrated memory chip comprises a substrate, a control gate, a word line, and an isolation structure. The substrate comprises a first source/drain region. The control gate and the word line are on the substrate. The word line is between and borders the first source/drain region and the control gate and is elongated along a length of the word line. The isolation structure extends into the substrate and has a first isolation-structure sidewall. The first isolation-structure sidewall extends laterally along the length of the word line and underlies the word line.