Invention Grant
- Patent Title: Single fin structures
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Application No.: US16688267Application Date: 2019-11-19
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Publication No.: US11127842B2Publication Date: 2021-09-21
- Inventor: Haiting Wang , Hong Yu , Zhenyu Hu
- Applicant: GLOBALFOUNDRIES U.S. INC.
- Applicant Address: US CA Santa Clara
- Assignee: GLOBALFOUNDRIES U.S. INC.
- Current Assignee: GLOBALFOUNDRIES U.S. INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Roberts Calderon Safran & Cole, P.C.
- Agent Francois Pagette; Andrew M. Calderon
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L29/78 ; H01L29/06 ; H01L21/762 ; H01L29/45 ; H01L21/285 ; H01L29/417

Abstract:
The present disclosure generally relates to semiconductor structures and, more particularly, to single fin structures and methods of manufacture. The structure includes: an active single fin structure; a plurality of dummy fin structures on opposing sides of the active single fin structure; source and drain regions formed on the active single fin structure and the dummy fin structures; recessed shallow trench isolation (STI) regions between the dummy fin structures and the active single fin structure and below a surface of the dummy fin structures; and contacts formed on the source and drain regions of the active single fin structure with a spacing of at least two dummy fin structures on opposing sides of the contacts.
Public/Granted literature
- US20210151581A1 SINGLE FIN STRUCTURES Public/Granted day:2021-05-20
Information query
IPC分类: