Invention Grant
- Patent Title: Showerhead having a detachable gas distribution plate
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Application No.: US16846000Application Date: 2020-04-10
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Publication No.: US11130142B2Publication Date: 2021-09-28
- Inventor: Dmitry Lubomirsky , Vladimir Knyazik , Hamid Noorbakhsh , Jason Della Rosa , Zheng John Ye , Jennifer Y. Sun , Sumanth Banda
- Applicant: APPLIED MATERIALS, INC.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Moser Taboada
- Main IPC: C23C16/40
- IPC: C23C16/40 ; B05B1/00 ; C23C16/455 ; H01J37/32 ; B05B1/18

Abstract:
Embodiments of showerheads having a detachable gas distribution plate are provided herein. In some embodiments, a showerhead for use in a substrate processing chamber includes a body having a first side and an opposing second side; a gas distribution plate disposed proximate the second side of the body; and a clamp disposed about a peripheral edge of the gas distribution plate to removably couple the gas distribution plate to the body, wherein the body is electrically coupled to the gas distribution plate through the clamp.
Public/Granted literature
- US20200238303A1 SHOWERHEAD HAVING A DETACHABLE GAS DISTRIBUTION PLATE Public/Granted day:2020-07-30
Information query
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