- 专利标题: Glass substrate, laminated substrate, laminated substrate manufacturing method, laminate, package, and glass substrate manufacturing method
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申请号: US15877509申请日: 2018-01-23
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公开(公告)号: US11133215B2公开(公告)日: 2021-09-28
- 发明人: Yu Hanawa , Shuhei Nomura , Kazutaka Ono , Nobuhiko Takeshita , Keisuke Hanashima
- 申请人: AGC Inc.
- 申请人地址: JP Chiyoda-ku
- 专利权人: AGC Inc.
- 当前专利权人: AGC Inc.
- 当前专利权人地址: JP Chiyoda-ku
- 代理机构: Oblon, McClelland, Maier & Neustadt, L.L.P.
- 优先权: JPJP2015-147249 20150724,JPJP2015-256895 20151228
- 主分类号: H01L21/56
- IPC分类号: H01L21/56 ; H01L21/687 ; C03B33/023 ; H01L23/15 ; H01L23/00 ; B32B17/00 ; B65D85/48 ; C03B33/02 ; H01L21/67 ; G05B1/00 ; H01L23/544 ; C03C27/10 ; B32B17/10
摘要:
A glass substrate is laminated with a substrate containing silicon to thereby form a laminated substrate. The glass substrate has a concave surface and a convex surface and has one or more marks that distinguish between the concave surface and the convex surface.
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