- Patent Title: Semiconductor manufacturing apparatus member, and display manufacturing apparatus and semiconductor manufacturing apparatus comprising semiconductor manufacturing apparatus member
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Application No.: US16802180Application Date: 2020-02-26
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Publication No.: US11142829B2Publication Date: 2021-10-12
- Inventor: Yasutaka Nitta , Takuma Wada
- Applicant: TOTO LTD.
- Applicant Address: JP Kitakyushu
- Assignee: TOTO LTD.
- Current Assignee: TOTO LTD.
- Current Assignee Address: JP Kitakyushu
- Agency: Carrier Blackman & Associates, P.C.
- Agent William D. Blackman; Joseph P. Carrier
- Priority: JPJP2019-033546 20190227,JP2019-222021 20191209
- Main IPC: H01L21/67
- IPC: H01L21/67 ; C23C28/04 ; H01J37/32 ; C23C30/00
Abstract:
According to one embodiment, a semiconductor manufacturing apparatus member includes a base and a particle-resistant layer. The base includes a main portion and an alumite layer. The main portion includes aluminum. The alumite layer is provided at a front surface of the main portion. The particle-resistant layer is provided on the alumite layer and includes a polycrystalline ceramic. An Al purity of the main portion is 99.00% or more.
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