Invention Grant
- Patent Title: Bonded assembly containing metal-organic framework bonding dielectric and methods of forming the same
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Application No.: US16774446Application Date: 2020-01-28
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Publication No.: US11171097B2Publication Date: 2021-11-09
- Inventor: Ramy Nashed Bassely Said , Raghuveer S. Makala , Senaka Kanakamedala , Fei Zhou , Yao-Sheng Lee
- Applicant: SANDISK TECHNOLOGIES LLC
- Applicant Address: US TX Addison
- Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee Address: US TX Addison
- Agency: The Marbury Law Group PLLC
- Main IPC: H01L23/00
- IPC: H01L23/00

Abstract:
A bonded assembly includes a first semiconductor die containing a first substrate, first semiconductor devices, and first bonding pads that are electrically connected to a respective node of the first semiconductor devices, a second semiconductor die containing a second substrate, second semiconductor devices, and second bonding pads that are electrically connected to a respective node of the second semiconductor devices and bonded to a respective one of the first bonding pads, and at least one metal-organic framework (MOF) dielectric layer that laterally surrounds at least one of the first bonding pads and the second bonding pads.
Public/Granted literature
- US20210233881A1 BONDED ASSEMBLY CONTAINING METAL-ORGANIC FRAMEWORK BONDING DIELECTRIC AND METHODS OF FORMING THE SAME Public/Granted day:2021-07-29
Information query
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