- 专利标题: Electromigration sign-off tool
-
申请号: US16929503申请日: 2020-07-15
-
公开(公告)号: US11182528B2公开(公告)日: 2021-11-23
- 发明人: Yu-Tseng Hsien , Chin-Shen Lin , Ching-Shun Yang , Jui-Feng Kuan
- 申请人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 申请人地址: TW Hsin-Chu
- 专利权人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 当前专利权人地址: TW Hsin-Chu
- 代理机构: Eschweiler & Potashnik, LLC
- 主分类号: G06F30/392
- IPC分类号: G06F30/392 ; H01L21/768 ; G06F30/367 ; G06F30/398 ; G01R31/28
摘要:
The present disclosure relates to a method of performing electromigration sign-off. The method includes determining a change in temperature due to joule heating from an RMS current of a first interconnect. The change in temperature due to joule heating is added to a change in temperature due to device self-heating to determine a first change in real temperature. A first average current limit is determined for the first interconnect using the first change in real temperature. A first average current on the first interconnect is compared to the first average current limit to determine if a first electromigration violation is present on the first interconnect. A second average current is determined for a second interconnect using a second change in real temperature. The second average current is compared to a second average current limit to determine if a second electromigration violation is present on the second interconnect.
公开/授权文献
- US20200342156A1 ELECTROMIGRATION SIGN-OFF TOOL 公开/授权日:2020-10-29
信息查询