Invention Grant
- Patent Title: Integrated circuits with recessed gate electrodes
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Application No.: US16844588Application Date: 2020-04-09
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Publication No.: US11183432B2Publication Date: 2021-11-23
- Inventor: Srijit Mukherjee , Christopher J. Wiegand , Tyler J. Weeks , Mark Y. Liu , Michael L. Hattendorf
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Schwabe, Williamson & Wyatt, P.C.
- Main IPC: H01L27/092
- IPC: H01L27/092 ; H01L21/8238 ; H01L27/088 ; H01L29/66 ; H01L27/11 ; H01L21/8234 ; H01L21/28 ; H01L29/49

Abstract:
Integrated circuits including MOSFETs with selectively recessed gate electrodes. Transistors having recessed gate electrodes with reduced capacitive coupling area to adjacent source and drain contact metallization are provided alongside transistors with gate electrodes that are non-recessed and have greater z-height. In embodiments, analog circuits employ transistors with gate electrodes of a given z-height while logic gates employ transistors with recessed gate electrodes of lesser z-height. In embodiments, subsets of substantially planar gate electrodes are selectively etched back to differentiate a height of the gate electrode based on a given transistor's application within a circuit.
Public/Granted literature
- US20200235014A1 INTEGRATED CIRCUITS WITH RECESSED GATE ELECTRODES Public/Granted day:2020-07-23
Information query
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