Invention Grant
- Patent Title: Semiconductor pillars having triangular-shaped lateral peripheries, and integrated assemblies
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Application No.: US16704938Application Date: 2019-12-05
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Publication No.: US11201167B2Publication Date: 2021-12-14
- Inventor: Albert Fayrushin , Augusto Benvenuti , Haitao Liu , Xin Lan
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Wells St. John P.S.
- Main IPC: H01L27/11582
- IPC: H01L27/11582 ; H01L29/10 ; H01L27/11573 ; H01L29/51 ; H01L27/11565

Abstract:
Some embodiments include a pillar which contains semiconductor material, and which extends primarily along a first direction. A cross-section through the pillar along a second direction orthogonal to the first direction is through the semiconductor material and includes a lateral periphery of the pillar configured as three-sided shape. Some embodiments include an integrated assembly having a vertical stack of alternating first and second levels. The first levels include conductive structures and the second levels are insulative. Channel-material-pillars extend through the vertical stack. Each of the channel-material-pillars has a top-down cross-section which includes a lateral periphery configured as three-sided shape of an equilateral triangle with rounded vertices.
Public/Granted literature
- US20210175246A1 Semiconductor Pillars Having Triangular-Shaped Lateral Peripheries, and Integrated Assemblies Public/Granted day:2021-06-10
Information query
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