Invention Grant
- Patent Title: Chemical vapor deposition system including ground strap bar
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Application No.: US15990051Application Date: 2018-05-25
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Publication No.: US11214870B2Publication Date: 2022-01-04
- Inventor: Jaihyuk Choi , Jong-hoon Park , Kyungjoo Min , Wonwoong Park , Sukwon Jung , Hyunwoo Joo , Myungsoo Huh
- Applicant: Samsung Display Co., Ltd.
- Applicant Address: KR Yongin-Si
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Yongin-Si
- Agency: Innovation Counsel LLP
- Priority: KR10-2017-0066330 20170529
- Main IPC: C23C16/458
- IPC: C23C16/458 ; C23C16/44 ; H01J37/32 ; C23C16/50 ; H01L21/687 ; C23C16/509 ; C23C16/455 ; H01R9/16 ; H01R9/00 ; H01L21/02

Abstract:
A chemical vapor deposition (CVD) system may include a chamber, a susceptor provided in the chamber to support a substrate, a gas distribution part provided over the susceptor, a first ground strap bar provided on a bottom inner surface of the chamber and electrically connected to the chamber, a second ground strap bar provided on a bottom surface of the susceptor and electrically connected to the susceptor, and a plurality of ground straps electrically connected to the first and second ground strap bars, each of the plurality of ground straps including two opposite portions that are fastened to the first and second ground strap bars, respectively.
Public/Granted literature
- US20180340258A1 CHEMICAL VAPOR DEPOSITION SYSTEM Public/Granted day:2018-11-29
Information query
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